In close cooperation with well-known providers of inspection systems, we provide modular systems for quality control and classification of raw wafers.
Our Wafer Inspection System – WIS – carries out a fully automated inspection of mono- and polycrystalline silicon wafers. The modular design of the system means that individual configuration with the latest inspection technologies as well as smooth integration into your product lines are possible.
The systems can achieve an average throughput of up to 3600 wafers per hour with the lowest failure rates. Like all of our systems, the WIS boasts outstanding material and manufacturing quality as well as easy maintenance and user friendliness.
The system can be connected to your Manufacturing Execution System (MES) and to your fully automated transport and storage system.
Separation of wafer from wafer stack
Configurable measuring module through integration of up to three inspection systems
Loading of chemical carrier
Optimum combination of automation and inspection (stop and go and on-the-fly)
MES SECS / GEM PV2
Inspection of up to three quality features: geometry, thickness/ TTV, micro-crack and lifetime
Interlinking with automated Transport and Storage System
direct connection to Wet Bench Loader