The highly sophisticated machine platform HJT TRAY AUTOMATION ensures the fully automated loading and unloading of trays for inline-coating processes. Outstanding innovation is the particularly surface-friendly, yet high-performance handling of wafers in inline flat-carrier transport. This involves high-precision, row-by-row positioning of the wafers which are individually measured. Any deviations from the target dimensions are automatically compensated for. During the measurement and compensation process, the measurement system takes temperature-dependent length extension of the trays in to account as well. Thus the system is ideally suited to handle ultra-thin wafers with highly-sensitive coats.
The modular HJT TRAY AUTOMATION enables a custom-tailored configuration in regard to the wafer infeed and outfeed, the integration of measurement and control systems, interface integration with process equipment as well as tray type.
The system can achieve a throughput rate of 6,500 wafer/h with less than 0.03 % failure rate, making it the most efficient system available on the market for the loading and unloading of inline coating systems in the production of heterojunction solar cells.
Configurable for a number of processes, such as PECVD and PVD
Perfectly adapted to process equipment for the production of solar cells with heterojunction technology (HJT)
High process quality due to the innovative handling and precise positioning of wafers on the tray
Sensor/ Camera controlled wafer alignment for optimum wafer position into tray pockets and easy integration of customized measurement needs (thickness, color)
Single-end or double-end configuration available
Virtual material tracking
MES SECS / GEM PV2
Color inspection system with reject bins
Breakage detection for unprocessed wafers