The highly sophisticated machine platform WHD meets the various requirements of solar cell mass production. The WHD ensures the efficient, fully automated loading and unloading of quartz boats in the diffusion process step .
All automation steps and components are designed for future requirements, such as low wafer thicknesses. High flexibility in terms of production capacity utilization and process variations, are yet another key benefits. WHD is available in a variety of versions to ensure compatibility with the specific process requirements, capacities and degrees of automation.
Based on the high throughput of the WHD HTP it is possible to automate one (single), two (TWIN) or three (triple) tube furnaces with one machine.
In the configuration WHD HTP (triple), the system achieves a throughput rate of 10,000 wafer/h, making it the most powerful system available on the market.
configured for use with various diffusion furnaces | processes are i.e. POCl3, BBr3, BCl3, annealing, oxidation
configurable with regard to material supply | automation- and chemical carriers
configurable for different boat types and loading types
high process quality due to gentle and sensor-controlled handling of the material
automation of up to three process ovens with one WHD HTP (single, TWIN, triple)
integrated “back-to-back” function
virtual material tracking
MES SECS / GEM PV2
convenient operation from one side