The highly sophisticated machine platform Tray Automation ensures the fully automated loading and unloading of trays for inline-coating processes. The system is specially designed and ideally suited to handle ultra-thin wafers with highly-sensitive coats
The modular Tray Automation enables a very custom-tailored configuration in regard to the wafer infeed and outfeed, the integration of measurement and control systems, interface integration with process equipment as well as tray type.
The system can achieve a throughput rate of 6,500 wafer/h with less than 0.03 % failure rate, making it the most efficient system available on the market for the loading and unloading of inline coating systems in the production of crystalline solar cells.
Configurable for a number of processes, such as ALD, PECVD, PVD and CVD
Can be perfectly adapted to process equipment for the production of solar cells with hetero-junction technology (HJT)
High process quality due to the careful and precise handling and positioning of wafers on the tray
Single-end or double-end configuration available
Virtual material tracking
MES SECS / GEM PV2
Color inspection system with reject bins
Breakage detection for unprocessed wafers